75 Shore black, high temperature perfluoroelastomer (FFKM) . It provides a significantly wider operational range and superior compression set resistance than any other perfluoroelastomer. With an upper temperature limit of 300ºC, it’s the elastomer of choice for the most demanding service conditions.
Highly pure perfluoroelastomer (FFKM). Contains nanoparticles of polytetrafluoroethylene (PTFE) which acts as organic filler. Exhibits very good oxygen and fluorine plasma resistance, very low particle generation and low outgassing. Shows excellent mechanical and sealing properties. Offers low friction, high abrasion & chemical resistance and low modulus. Suitable for dry (plasma etching, PECVD, LPCVD, metal CVD, PVD, ALD, plasma cleans) and wet semiconductor processes (wafer cleaning, polymer removal, wet etching, polishing). Designed for semiconductor manufacturing applications like chamber seals, lid seals, window seals, gas inlet seals, fitting seals, slit valve gates, lip seals and wafer handling parts.
Custom sizing and compounds available
O-rings are specially processed for use in High Vacuum and Ultra High Vacuum equipment. All of our O-rings are cleaned and packaged in a certified Class 100/ISO Class 5 Cleanroom, making them suitable for immediate use in HV, UHV, or EUV applications.
Standard O-ring sizes (pdf)
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