PERFLUOROELASTOMER FFKM o-rings

Tecnoflon® PFR 75-BX2 is a 75 Shore A black, high temperature perfluoroelastomer (FFKM) compound

based on Tecnoflon® PFR 95HT. It provides a significantly wider operational range and superior compression set resistance than any other perfluoroelastomer. With an upper temperature limit of 300ºC, it’s the elastomer of choice for the most demanding service conditions.

Highly pure perfluoroelastomer (FFKM). Contains nanoparticles of polytetrafluoroethylene (PTFE) which acts as organic filler. Exhibits very good oxygen and fluorine plasma resistance, very low particle generation and low outgassing. Shows excellent mechanical and sealing properties. Offers low friction, high abrasion & chemical resistance and low modulus. Suitable for dry (plasma etching, PECVD, LPCVD, metal CVD, PVD, ALD, plasma cleans) and wet semiconductor processes (wafer cleaning, polymer removal, wet etching, polishing). FFKM 5920M is designed for semiconductor manufacturing applications like chamber seals, lid seals, window seals, gas inlet seals, fitting seals, slit valve gates, lip seals and wafer handling parts. 

Custom sizing and compounds available